Engineering Mechanical Systems at Micron Level-Computational and Modeling Paradigms

Ranajay Ghosh and Subrata Mukherjee

ABSTRACT: Engineering incredibly complex systems at the micron and sub-micron scales is a new fascination of this century. With increasing application possibilities fast and accurate simulations of such systems are a prime concern for saving time and expenditure involved in design, fabrication and testing. Simulating systems at this level open up very exciting avenues of research particularly due to the confluence of multiple domain physics. The present paper explores some of the exciting advances in the area of simulation of micron level devices and an example of the dynamics of a coupled electro-mechanical system using a coupled FEM-BEM approach.

KEYWORDS: Microelectromechanical systems, fastcomputation, computational mechanics, multi-physics

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